Thin film battery, anode film for thin film batter

专利名称：Thin film battery, anode film for thin film

battery and preparation method thereof

发明人：Maw-Kuen Wu,Chia-Lin Wang,Yang-Chung

Liao,Nyan-Hwa Tai,Fong-Chi Hsu

申请号：US11035855申请日：20050113

公开号：US20060151313A1公开日：20060713

专利附图：

摘要：Method for preparation of anode film for thin film battery comprises: providinga target material to provide Li ion and Ti ion and a substrate comprising a base layer, a

buffer layer and a precious metal current collector layer; sputtering LiMO layer on a saidsubstrate at high temperature in a vacuum chamber and obtaining the anode film for thinfilm battery of this invention. In this invention, material for the precious metal currentcollector may be a precious metal such as Ag, Au, Pt etc., the alloy and oxides of thesemetals. The sputtering temperature may be above 300° C., preferably above 500° C. andmost preferably above 650° C. The anode thin film material so prepared may be LiTiO.This invention also discloses anode film so prepared and thin film battery using suchanode film.

申请人：Maw-Kuen Wu,Chia-Lin Wang,Yang-Chung Liao,Nyan-Hwa Tai,Fong-Chi Hsu

地址：Taipei TW,Huatan Township TW,Ji-an Township TW,Hsinchu TW,Chu-Tung CityTW

国籍：TW,TW,TW,TW,TW

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